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piezoelectric mems resonators

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Uploaded On:: July 5, 2017, 2:13 p.m.
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Author: Harmeet Bhugra, Gianluca Piazza Edition: 1st ed. 2017 edition Publication Date: January 10, 2017 Publisher: Springer ISBN-10: 3319286862 ISBN-13: 978-3319286860 Pages: 424 pages Format: pdf Size: 14M --- This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices --- http://dlfeb.com/book/piezoelectric-mems-resonators-microsystems-and-nanosystems/

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piezoelectric mems resonators

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